Patoux Adelin, Agez Gonzague, Girard Christian, Paillard Vincent, Wiecha Peter R, Lecestre Aurélie, Carcenac Franck, Larrieu Guilhem, Arbouet Arnaud
CEMES-CNRS, Université de Toulouse, CNRS, Toulouse, France.
LAAS-CNRS, Université de Toulouse, CNRS, Toulouse, France.
Sci Rep. 2021 Mar 10;11(1):5620. doi: 10.1038/s41598-021-84666-z.
Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these objects. In this work, we study in details the influence of the most common fabrication errors on the optical response of a metasurface and quantitatively assess the tolerance to fabrication errors based on extensive numerical simulations. We illustrate these results with the design, fabrication and characterization of a silicon nanoresonator-based metasurface that operates as a beam deflector in the near-infrared range.
光学超表面作为体积较大的光学元件更便宜、更轻的替代品，引发了人们极大的期待。近年来，人们提出了结合多种光学功能的新型元件，这进一步提高了对这些物体制造精度的要求。在这项工作中，我们详细研究了最常见的制造误差对超表面光学响应的影响，并基于广泛的数值模拟定量评估了对制造误差的耐受性。我们通过设计、制造和表征一种基于硅纳米谐振器的超表面来说明这些结果，该超表面在近红外范围内用作光束偏转器。
