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兆赫兹和吉赫兹脉冲重复率下双脉冲的飞秒激光烧蚀

Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates.

作者信息

Žemaitis Andrius, Gaidys Mantas, Gečys Paulius, Barkauskas Martynas, Gedvilas Mindaugas

出版信息

Opt Express. 2021 Mar 1;29(5):7641-7653. doi: 10.1364/OE.417883.

DOI:10.1364/OE.417883
PMID:33726261
Abstract

Here, to the best of our knowledge, for the first time we report an in-depth experimental study of high ultrafast laser ablation efficiency for processing of copper and steel with single-pulses, MHz, GHz, and burst-in-the-burst (biburst) regimes. The comparison of burst, biburst, and single-pulse ablation efficiencies was performed for beam-size-optimised regimes, showing the real advantages and disadvantages of milling and drilling processing approaches. Highly efficient ultrashort pulse laser processing was achieved for ∼1 µm optical wavelength: 8.8 µm/µJ for copper drilling, 5.6 µm/µJ for copper milling, and 6.9 µm/µJ for steel milling. We believe that the huge experimental data collected in this study will serve well for the better understanding of laser burst-matter interaction and theoretical modelling.

摘要

在此,据我们所知,我们首次报告了一项关于在单脉冲、兆赫兹、吉赫兹和突发脉冲串(biburst)模式下对铜和钢进行加工时的高超快激光烧蚀效率的深入实验研究。针对光束尺寸优化模式对突发脉冲串、突发脉冲串和单脉冲烧蚀效率进行了比较,展示了铣削和钻孔加工方法的实际优缺点。对于约1 µm的光波长实现了高效的超短脉冲激光加工:铜钻孔为8.8 µm/µJ,铜铣削为5.6 µm/µJ,钢铣削为6.9 µm/µJ。我们相信,本研究中收集的大量实验数据将有助于更好地理解激光与物质的突发脉冲串相互作用以及理论建模。

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Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates.兆赫兹和吉赫兹脉冲重复率下双脉冲的飞秒激光烧蚀
Opt Express. 2021 Mar 1;29(5):7641-7653. doi: 10.1364/OE.417883.
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引用本文的文献

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Ultrasmooth Micromilling of Stainless Steel by Ultrashort Pulsed Laser Ablation Using MHz Bursts.利用兆赫兹脉冲串的超短脉冲激光烧蚀对不锈钢进行超光滑微铣削加工
ACS Appl Mater Interfaces. 2025 Feb 5;17(5):7989-8002. doi: 10.1021/acsami.4c19517. Epub 2025 Jan 22.
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Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes.使用重复单脉冲、兆赫兹和吉赫兹脉冲序列对硅进行飞秒激光冲击钻孔
Micromachines (Basel). 2024 May 9;15(5):632. doi: 10.3390/mi15050632.
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Bi-stability in femtosecond laser ablation by MHz bursts.
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Sci Rep. 2024 Mar 7;14(1):5614. doi: 10.1038/s41598-024-54928-7.
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