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兆赫兹和吉赫兹脉冲重复率下双脉冲的飞秒激光烧蚀

Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates.

作者信息

Žemaitis Andrius, Gaidys Mantas, Gečys Paulius, Barkauskas Martynas, Gedvilas Mindaugas

出版信息

Opt Express. 2021 Mar 1;29(5):7641-7653. doi: 10.1364/OE.417883.

Abstract

Here, to the best of our knowledge, for the first time we report an in-depth experimental study of high ultrafast laser ablation efficiency for processing of copper and steel with single-pulses, MHz, GHz, and burst-in-the-burst (biburst) regimes. The comparison of burst, biburst, and single-pulse ablation efficiencies was performed for beam-size-optimised regimes, showing the real advantages and disadvantages of milling and drilling processing approaches. Highly efficient ultrashort pulse laser processing was achieved for ∼1 µm optical wavelength: 8.8 µm/µJ for copper drilling, 5.6 µm/µJ for copper milling, and 6.9 µm/µJ for steel milling. We believe that the huge experimental data collected in this study will serve well for the better understanding of laser burst-matter interaction and theoretical modelling.

摘要

在此,据我们所知,我们首次报告了一项关于在单脉冲、兆赫兹、吉赫兹和突发脉冲串(biburst)模式下对铜和钢进行加工时的高超快激光烧蚀效率的深入实验研究。针对光束尺寸优化模式对突发脉冲串、突发脉冲串和单脉冲烧蚀效率进行了比较,展示了铣削和钻孔加工方法的实际优缺点。对于约1 µm的光波长实现了高效的超短脉冲激光加工:铜钻孔为8.8 µm/µJ,铜铣削为5.6 µm/µJ,钢铣削为6.9 µm/µJ。我们相信,本研究中收集的大量实验数据将有助于更好地理解激光与物质的突发脉冲串相互作用以及理论建模。

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