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超短脉冲激光爆轰脉冲烧蚀金属的实验与理论研究综述

Review on Experimental and Theoretical Investigations of Ultra-Short Pulsed Laser Ablation of Metals with Burst Pulses.

作者信息

Förster Daniel J, Jäggi Beat, Michalowski Andreas, Neuenschwander Beat

机构信息

Institut für Strahlwerkzeuge, University of Stuttgart, Pfaffenwaldring 43, 70569 Stuttgart, Germany.

LightPulse LASER PRECISION, Pfaffenwaldring 43, 70569 Stuttgart, Germany.

出版信息

Materials (Basel). 2021 Jun 16;14(12):3331. doi: 10.3390/ma14123331.

DOI:10.3390/ma14123331
PMID:34208648
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8235081/
Abstract

Laser processing with ultra-short double pulses has gained attraction since the beginning of the 2000s. In the last decade, pulse bursts consisting of multiple pulses with a delay of several 10 ns and less found their way into the area of micromachining of metals, opening up completely new process regimes and allowing an increase in the structuring rates and surface quality of machined samples. Several physical effects such as shielding or re-deposition of material have led to a new understanding of the related machining strategies and processing regimes. Results of both experimental and numerical investigations are placed into context for different time scales during laser processing. This review is dedicated to the fundamental physical phenomena taking place during burst processing and their respective effects on machining results of metals in the ultra-short pulse regime for delays ranging from several 100 fs to several microseconds. Furthermore, technical applications based on these effects are reviewed.

摘要

自21世纪初以来，超短双脉冲激光加工就备受关注。在过去十年中，由多个延迟为几十纳秒及以下的脉冲组成的脉冲串进入了金属微加工领域，开启了全新的工艺模式，并提高了加工样品的结构化速率和表面质量。诸如材料屏蔽或再沉积等多种物理效应，引发了对相关加工策略和加工模式的新认识。在激光加工过程中，针对不同的时间尺度，将实验研究和数值研究的结果结合起来进行分析。本综述致力于探讨脉冲串加工过程中发生的基本物理现象，以及它们在超短脉冲模式下对金属加工结果的各自影响，脉冲延迟范围从几百飞秒到几微秒。此外，还对基于这些效应的技术应用进行了综述。

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