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通过拉曼光谱研究表面处理对不同晶粒尺寸的化学气相沉积金刚石层结构性能的影响。

The Effect of Surface Treatment on Structural Properties of CVD Diamond Layers with Different Grain Sizes Studied by Raman Spectroscopy.

作者信息

Dychalska Anna, Koczorowski Wojciech, Trzcinski Marek, Mosińska Lidia, Szybowicz Mirosław

机构信息

Faculty of Materials Engineering and Technical Physics, Poznan University of Technology, Piotrowo 3, 60-965 Poznan, Poland.

Centre for Advanced Technologies, Adam Mickiewicz University, ul. Umultowska 89C, 61-614 Poznan, Poland.

出版信息

Materials (Basel). 2021 Mar 8;14(5):1301. doi: 10.3390/ma14051301.

DOI:10.3390/ma14051301
PMID:33800508
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7962972/
Abstract

Extensive Raman spectroscopy studies combined with scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) measurements were performed to investigate structural and chemical changes in diamond layers deposited by chemical vapour deposition (CVD) upon post-growth treatment with hydrogen. The aim of this study is to characterize the changes in micro-structural properties of diamond layers with different grain sizes and different contents of sp carbon phase. Hydrogenation or oxidization of diamond layer surface is often performed to modify its properties; however, it can also strongly affect the surface structure. In this study, the impact of hydrogenation on the structure of diamond layer surface and its chemical composition is investigated. Owing to their polycrystalline nature, the structural properties of CVD diamond layers can strongly differ within the same layer. Therefore, in this project, in order to compare the results before and after hydrogen treatment, the diamond layers are subjected to Raman spectroscopy studies in the vicinity of a T-shape marker fabricated on the surface of each diamond layer studied.

摘要

结合扫描电子显微镜（SEM）和X射线光电子能谱（XPS）测量进行了广泛的拉曼光谱研究，以研究通过化学气相沉积（CVD）沉积的金刚石层在氢气后生长处理后的结构和化学变化。本研究的目的是表征具有不同晶粒尺寸和不同sp碳相含量的金刚石层的微观结构性质变化。金刚石层表面的氢化或氧化通常用于改变其性质；然而，它也会强烈影响表面结构。在本研究中，研究了氢化对金刚石层表面结构及其化学成分的影响。由于其多晶性质，CVD金刚石层的结构性质在同一层内可能有很大差异。因此，在本项目中，为了比较氢气处理前后的结果，对每个研究的金刚石层表面上制造的T形标记附近的金刚石层进行拉曼光谱研究。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/82f0ecbeec3b/materials-14-01301-g012.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/d2f58e2c1269/materials-14-01301-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/6a82464fc448/materials-14-01301-g002.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/c6840b1f2a56/materials-14-01301-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/642ff30125f5/materials-14-01301-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/c3cfccf8691e/materials-14-01301-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/11cddd7cf3e7/materials-14-01301-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bdbb/7962972/99347b6ff71a/materials-14-01301-g010.jpg
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