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钛和钼覆盖层对金刚石单晶退火过程中表面重构的影响。

Effect of Titanium and Molybdenum Cover on the Surface Restructuration of Diamond Single Crystal during Annealing.

作者信息

Okotrub Alexander V, Sedelnikova Olga V, Gorodetskiy Dmitriy V, Fedorenko Anastasiya D, Asanov Igor P, Palyanov Yury N, Lapega Alina V, Gurova Olga A, Bulusheva Lyubov G

机构信息

Nikolaev Institute of Inorganic Chemistry SB RAS, 630090 Novosibirsk, Russia.

Sobolev Institute of Geology and Mineralogy, 630090 Novosibirsk, Russia.

出版信息

Materials (Basel). 2023 Feb 16;16(4):1650. doi: 10.3390/ma16041650.

DOI:10.3390/ma16041650
PMID:36837276
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9965767/
Abstract

Diamond is an important material for electrical and electronic devices. Because the diamond is in contact with the metal in these applications, it becomes necessary to study the metal-diamond interaction and the structure of the interface, in particular, at elevated temperatures. In this work, we study the interaction of the (100) and (111) surfaces of a synthetic diamond single crystal with spattered titanium and molybdenum films. Atomic force microscopy reveals a uniform coating of titanium and the formation of flattened molybdenum nanoparticles. A thin titanium film is completely oxidized upon contact with air and passes from the oxidized state to the carbide state upon annealing in an ultrahigh vacuum at 800 °C. Molybdenum interacts with the (111) diamond surface already at 500 °C, which leads to the carbidization of its nanoparticles and catalytic graphitization of the diamond surface. This process is much slower on the (100) diamond surface; sp-hybridized carbon is formed on the diamond and the top of molybdenum carbide nanoparticles, only when the annealing temperature is raised to 800 °C. The conductivity of the resulting sample is improved when compared to the Ti-coated diamond substrates and the Mo-coated (111) substrate annealed at 800 °C. The presented results could be useful for the development of graphene-on-diamond electronics.

摘要

金刚石是电气和电子设备的重要材料。由于在这些应用中金刚石与金属接触,因此有必要研究金属 - 金刚石相互作用以及界面结构,特别是在高温下。在这项工作中,我们研究了合成金刚石单晶的(100)和(111)表面与溅射的钛和钼薄膜的相互作用。原子力显微镜显示钛的均匀涂层以及扁平钼纳米颗粒的形成。薄钛膜在与空气接触时完全氧化,并在800°C的超高真空中退火时从氧化态转变为碳化物态。钼在500°C时就与(111)金刚石表面相互作用,这导致其纳米颗粒的碳化和金刚石表面的催化石墨化。在(100)金刚石表面上这个过程要慢得多;只有当退火温度升至800°C时,在金刚石和碳化钼纳米颗粒顶部才会形成sp杂化碳。与涂钛金刚石基板和在800°C退火的涂钼(111)基板相比,所得样品的导电性得到了改善。所呈现的结果可能对金刚石上石墨烯电子学的发展有用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/a4a7c3e32cd3/materials-16-01650-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/4f35179f82fc/materials-16-01650-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/674cb68bc6f3/materials-16-01650-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/b20dd6730e9d/materials-16-01650-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/26cfacadc976/materials-16-01650-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/144d41846b4e/materials-16-01650-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/55e1c4281f6f/materials-16-01650-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/a4a7c3e32cd3/materials-16-01650-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/4f35179f82fc/materials-16-01650-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/674cb68bc6f3/materials-16-01650-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/b20dd6730e9d/materials-16-01650-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/26cfacadc976/materials-16-01650-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/144d41846b4e/materials-16-01650-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/55e1c4281f6f/materials-16-01650-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f4e0/9965767/a4a7c3e32cd3/materials-16-01650-g007.jpg

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