Wang Qing, Wang Shuxiao, Jia Lianxi, Cai Yan, Yue Wencheng, Yu Mingbin
Opt Express. 2021 Mar 29;29(7):10509-10517. doi: 10.1364/OE.420921.
We demonstrate a 1×64 optical phased array (OPA) based on a silicon on insulator (SOI) platform with integrated silicon nitride. The input port of the OPA is fabricated using a silicon nitride waveguide due to its advantage of allowing more optical power. The phase shifter is a silicon waveguide with heater because of the higher thermo-optic coefficient of silicon. And a double layer silicon nitride assisted grating is used in the emitter to reduce the emission strength and then increase the length of emitter to reduce the spot size. The length of the grating emitter is 1.5 mm and the measured field of view of this optical phased array is 35.5°×22.7° with spot size of 0.69°×0.075°.
我们展示了一种基于绝缘体上硅（SOI）平台并集成了氮化硅的1×64光学相控阵（OPA）。OPA的输入端口采用氮化硅波导制造，因为其具有允许更多光功率的优势。移相器是带有加热器的硅波导，这是由于硅具有更高的热光系数。并且在发射器中使用了双层氮化硅辅助光栅来降低发射强度，然后增加发射器长度以减小光斑尺寸。光栅发射器的长度为1.5 mm，该光学相控阵的测量视场为35.5°×22.7°，光斑尺寸为0.69°×0.075°。
