Kenane Nizan, Keszler Douglas A
Department of Chemistry, Oregon State University, Corvallis, Oregon 97331, United States.
ACS Appl Mater Interfaces. 2021 Apr 28;13(16):18974-18983. doi: 10.1021/acsami.0c21942. Epub 2021 Apr 13.
Details of the chemistry enabling the patterning of organotin photoresists to single-digit-nm resolution continue to engage study. In this report, we examine the contributions of atmospheric gases to the differential dissolution rates of an -butyltin oxide hydroxide photoresist. Cryo scanning tunneling electron microscopy (cryo-STEM) produces a micrograph of the latent image of an irradiated resist film, readily distinguishing exposed and unexposed regions. Temperature-programmed desorption mass spectrometry (TPD-MS) and cryo electron energy loss spectroscopy (cryo-EELS) show that irradiated films are depleted in carbon through desorption of butane and butene. Upon aging in air, irradiated films absorb HO, as previously established. TPD-MS also reveals a previously unrecognized absorption of CO, which correlates to a heightened dissolution contrast. This absorption may play an active role in determining intrinsic patterning performance and its variability based on changes in atmospheric-gas composition.
使有机锡光刻胶图案化达到个位数纳米分辨率的化学细节仍在持续研究中。在本报告中，我们研究了大气气体对正丁基氧化锡氢氧化物光刻胶不同溶解速率的影响。低温扫描隧道电子显微镜（cryo-STEM）生成了辐照光刻胶膜潜像的显微照片，能轻松区分曝光和未曝光区域。程序升温脱附质谱（TPD-MS）和低温电子能量损失谱（cryo-EELS）表明，辐照膜通过丁烷和丁烯的脱附使碳含量减少。如先前已确定的那样，在空气中老化时，辐照膜会吸收HO。TPD-MS还揭示了一种先前未被认识到的CO吸收，这与增强的溶解对比度相关。这种吸收可能在基于大气气体成分变化确定固有图案化性能及其可变性方面发挥积极作用。
