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同步拉曼光热红外显微光谱法——一种用于识别硬盘及其他电子行业中小于10微米有机污染物的新型非接触式失效分析技术。

Optical Photothermal Infrared Microspectroscopy with Simultaneous Raman - A New Non-Contact Failure Analysis Technique for Identification of <10 μm Organic Contamination in the Hard Drive and other Electronics Industries.

作者信息

Kansiz Mustafa, Prater Craig, Dillon Eoghan, Lo Michael, Anderson Jay, Marcott Curtis, Demissie Abel, Chen Yanling, Kunkel Gary

机构信息

Photothermal Spectroscopy Corp, Santa Barbara, CA 93101.

Light Light Solutions, Athens, GA.

出版信息

Micros Today. 2020 May;28(3):26-36. doi: 10.1017/s1551929520000917. Epub 2020 May 18.

Abstract

Optical Photothermal Infrared (O-PTIR) spectroscopy is a new technique for measuring submicron spatial resolution IR spectra with little or no sample preparation. This speeds up analysis times benefiting high-volume manufacturers through gaining insight into process contamination that occurs during development and on production lines. The ability to rapidly obtain far-field non-contact IR spectra at high spatial resolution facilitates the chemical identification of small organic contaminants that are not possible to measure with conventional Fourier transform infrared (FT-IR) microspectroscopy. The unique pump-probe system architecture also facilitates submicron simultaneous IR + Raman microscopy from the same spot with the same spatial resolution. With these unique capabilities, O-PTIR is finding utilization in the high-volume and high-value industries of high-tech componentry (memory storage, electronics, displays, etc.).

摘要

光热红外(O-PTIR)光谱技术是一种用于测量亚微米空间分辨率红外光谱的新技术,几乎无需或完全无需样品制备。这加快了分析速度,通过深入了解开发过程中和生产线上出现的过程污染,使大批量制造商受益。能够在高空间分辨率下快速获得远场非接触红外光谱,有助于对传统傅里叶变换红外(FT-IR)显微光谱无法测量的小有机污染物进行化学鉴定。独特的泵浦-探测系统架构还便于在同一点以相同空间分辨率进行亚微米级同步红外+拉曼显微镜观察。凭借这些独特功能,O-PTIR正在高科技组件(内存存储、电子、显示器等)的大批量和高价值行业中得到应用。

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