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样品减薄对通过扫描电子显微镜中的透射菊池衍射测量的应变和晶格旋转的影响。

Effect of sample thinning on strains and lattice rotations measured from Transmission Kikuchi diffraction in the SEM.

作者信息

Karamched Phani S, Saravanan Naganand, Haley Jack C, Wilkinson Angus J, Lozano-Perez Sergio

机构信息

Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom.

Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom.

出版信息

Ultramicroscopy. 2021 Jun;225:113267. doi: 10.1016/j.ultramic.2021.113267. Epub 2021 Apr 9.

DOI:10.1016/j.ultramic.2021.113267
PMID:33878702
Abstract

Cross correlation based high angular resolution EBSD (or HR-EBSD) has been developed for measurement of elastic strains, lattice rotations (and estimating GND density). Recent advances in Transmission Kikuchi diffraction (TKD), especially the on-axis geometry allows the possibility of acquiring patterns at higher spatial resolution. However, some controversy remains as to whether stresses/strains measured after the sample thinning process are still representative of the bulk sample. In this paper, we explore a way of applying the HR-EBSD method to study strains and lattice rotations in an initially bulk sample, that is then progressively thinned down until a similar analysis can be performed on thin (and electron transparent) samples. Thus, HR-TKD will be compared as a possible alternative to HR-EBSD, in scenarios when it is not always possible to perform EBSD on the surface of the sample. An estimate of strain relaxation in the sample as a result of sample thinning is presented.

摘要

基于互相关的高角分辨率电子背散射衍射(或HR-EBSD)已被开发用于测量弹性应变、晶格旋转(以及估计位错密度)。透射菊池衍射(TKD)的最新进展,特别是轴上几何结构使得以更高空间分辨率获取图案成为可能。然而,关于在样品减薄过程后测量的应力/应变是否仍能代表块状样品,仍存在一些争议。在本文中,我们探索了一种应用HR-EBSD方法研究初始块状样品中的应变和晶格旋转的方法,然后将其逐步减薄,直到可以对薄(且电子透明)样品进行类似分析。因此,在并非总是能够在样品表面进行电子背散射衍射(EBSD)的情况下,将把高分辨率透射菊池衍射(HR-TKD)作为HR-EBSD的一种可能替代方法进行比较。本文给出了由于样品减薄导致的样品中应变弛豫的估计值。

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