Li Yan, Li Hao, Xiao Yifeng, Cao Le, Guo Zhan-She
School of Mechanical Electronic & Information Engineering, China University of Mining and Technology-Beijing, Beijing 100083, China.
School of Electrical and Electronic Engineering, Shanghai University of Engineering Science, Shanghai 201620, China.
Sensors (Basel). 2021 Apr 5;21(7):2545. doi: 10.3390/s21072545.
A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonlinearity because of the nonlinear vibration of the resonant beam. A verification circuit is devised to imitate the nonlinear behavior of the model by matching the simulation measurement error of the frequency offset produced by the circuit block with the theoretical counterparts obtained from the model. Secondly, the principle of measurement error compensation is studied, and the compensation method dealing with nonlinear characteristics of the resonant beam is proposed by introducing a compensation beam and corresponding differential operations. The measurement error, compensation rate, and measurement residual between the two scenarios that use single beam and double beams, respectively, are derived and are compared with their simulation and experimental counterparts. The results coincide with the predicted trend, which verifies the effectiveness of the compensation method.
提出了一种用于硅微谐振传感器非线性振动的补偿方法，并通过仿真和实验分析评估其有效性。首先，建立了硅微谐振传感器的参数表征模型，由于谐振梁的非线性振动，该模型呈现出显著的非线性。设计了一个验证电路，通过将电路模块产生的频率偏移的仿真测量误差与从模型中获得的理论对应值相匹配，来模拟模型的非线性行为。其次，研究了测量误差补偿原理，并通过引入补偿梁和相应的差分运算，提出了处理谐振梁非线性特性的补偿方法。分别推导了使用单梁和双梁的两种情况下的测量误差、补偿率和测量残差，并与它们的仿真和实验对应值进行比较。结果与预测趋势一致，验证了补偿方法的有效性。
