Xu Chao, Wang Junbo, Chen Deyong, Chen Jian, Qi Wenjie, Liu Bowen, Liang Tian, She Xu
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Micromachines (Basel). 2021 Apr 2;12(4):387. doi: 10.3390/mi12040387.
Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them unable to work as expected. This paper studied the temperature characteristics of electrochemical seismic sensors based on MEMS (micro-electro-mechanical systems), and analyzed the influences of the temperature effects on the open-loop and closed-loop amplitude-frequency curves. Most importantly, the temperature compensation circuits based on thermistors were developed, which effectively adjusted pole frequencies and sensitivity coefficients, and finally realized the real-time temperature compensation for both open-loop and closed-loop measurements for the first time. The results showed that in the temperature range of -10 °C ~ +40 °C, and with the 3 dB bandwidth range of 0.01 Hz ~ 40 Hz, the change of the maximum sensitivity was reduced from about 25 dB before temperature compensation to less than 2 dB after temperature compensation.
采用液体作为惯性质量的电化学地震传感器在低频领域具有高性能和较大工作倾斜度的优点。然而，周围温度变化对传感器的灵敏度有严重影响，这使得它们无法按预期工作。本文研究了基于微机电系统（MEMS）的电化学地震传感器的温度特性，并分析了温度效应对开环和闭环幅频曲线的影响。最重要的是，开发了基于热敏电阻的温度补偿电路，有效调整了极点频率和灵敏度系数，并首次实现了对开环和闭环测量的实时温度补偿。结果表明，在-10°C至+40°C的温度范围内，3 dB带宽范围为0.01 Hz至40 Hz时，最大灵敏度的变化从温度补偿前的约25 dB降低到温度补偿后的小于2 dB。
