Liang Tian, Liu Bowen, Chen Mingwei, Lu Yulan, Chen Jian, Chen Deyong, Wang Junbo
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, 100190 China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049 China.
Microsyst Nanoeng. 2022 Sep 15;8:100. doi: 10.1038/s41378-022-00418-7. eCollection 2022.
This paper presents a micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes. Theoretical analyses and numerical simulations were conducted to model the angular accelerometer with key geometrical parameters (e.g., electrode spacing, via spacing and via size) optimized. Highly integrated sensitive microelectrodes were manufactured based on microfabrication and assembled to form MEMS-based electrochemical angular accelerometers. Device characterization was conducted, locating a sensitivity of 80 V/(rad/s), a bandwidth of 0.01-18 Hz and a noise level of 3.98 × 10 (rad/s)/√Hz. In comparison to a previously reported electrochemical angular microaccelerometer, a significant improvement in sensitivity (80 V/(rad/s) vs. 10 V/(rad/s)) was achieved due to the new structure of sensitive microelectrodes. These results indicated the potential of the developed MEMS-based electrochemical angular accelerometer in seismology, including natural disaster monitoring and resource exploration.
本文介绍了一种具有高度集成敏感微电极的微机械电化学角加速度计。进行了理论分析和数值模拟，以对关键几何参数（如电极间距、过孔间距和过孔尺寸）进行优化的角加速度计进行建模。基于微加工制造了高度集成的敏感微电极，并组装形成基于MEMS的电化学角加速度计。进行了器件表征，得到灵敏度为80 V/(rad/s)、带宽为0.01 - 18 Hz以及噪声水平为3.98×10 (rad/s)/√Hz。与先前报道的电化学角微加速度计相比，由于敏感微电极的新结构，灵敏度有了显著提高（80 V/(rad/s) 对比 10 V/(rad/s)）。这些结果表明所开发的基于MEMS的电化学角加速度计在地震学领域的潜力，包括自然灾害监测和资源勘探。
