Hsiao Yu-Jen, Lin Ru-Li, Wang Hwi-Ming, Cai Cheng-Zhe
Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.
Department of Electrical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.
Micromachines (Basel). 2021 Apr 19;12(4):456. doi: 10.3390/mi12040456.
A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The experimental results of multilayer strain gauge show that adding Cr interlayer can improve the recovery and stability of the sensing electrode. When the interlayer Cr thickness was increased from 0 to 70 nm, the resistance decreased from 27 to 8.8 kΩ. The gauge factor (GF) value also decreased from 4.24 to 2.31 with the increase in the thickness of Cr interlayer from 30 to 70 nm, and the hysteresis phenomenon disappeared gradually. The multilayer Ti/Cr/Ti film has feasible application for strain sensor.
一种基于聚酰亚胺基底成功开发出的柔性Ti/Cr/Ti多层应变计。纯钛金属应变计在拉伸试验中电阻与应变的关系上表现出滞后现象。多层应变计的实验结果表明，添加铬中间层可以提高传感电极的恢复性和稳定性。当中间层铬的厚度从0增加到70纳米时，电阻从27千欧降低到8.8千欧。随着铬中间层厚度从30纳米增加到70纳米，应变片灵敏系数（GF）值也从4.24降低到2.31，并且滞后现象逐渐消失。多层Ti/Cr/Ti薄膜在应变传感器方面具有可行的应用。
