Dou Zhiqiang, Tang Jun, Liu Zhiduo, Sun Qigong, Wang Yang, Li Yamin, Yuan Miao, Wu Huijuan, Wang Yijun, Pei Weihua, Chen Hongda
The State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
University of Chinese Academy of Sciences, Beijing 100049, China.
Micromachines (Basel). 2021 Jan 22;12(2):108. doi: 10.3390/mi12020108.
Intraocular pressure (IOP) is an essential indicator of the diagnosis and treatment of glaucoma. IOP has an apparent physiological rhythm, and it often reaches its peak value at night. To avoid missing the peak value at night and sample the entire rhythm cycle, the continuous monitoring of IOP is urgently needed. A wearable contact lens IOP sensor based on a platinum (Pt) strain gauge is fabricated by the micro-electro-mechanical (MEMS) process. The structure and parameters of the strain gauge are optimized to improve the sensitivity and temperature stability. Tests on an eyeball model indicate that the IOP sensor has a high sensitivity of 289.5 μV/mmHg and excellent dynamic cycling performance at different speeds of IOP variation. The temperature drift coefficient of the sensor is 33.4 μV/°C. The non-invasive IOP sensor proposed in this report exhibits high sensitivity and satisfactory stability, promising a potential in continuous IOP monitoring.
眼压（IOP）是青光眼诊断和治疗的重要指标。眼压具有明显的生理节律，且常在夜间达到峰值。为避免错过夜间峰值并采集整个节律周期，迫切需要对眼压进行连续监测。一种基于铂（Pt）应变计的可穿戴隐形眼镜眼压传感器通过微机电（MEMS）工艺制造。对应变计的结构和参数进行了优化，以提高灵敏度和温度稳定性。在眼球模型上的测试表明，该眼压传感器具有289.5 μV/mmHg的高灵敏度以及在不同眼压变化速度下出色的动态循环性能。该传感器的温度漂移系数为33.4 μV/°C。本报告中提出的非侵入性眼压传感器具有高灵敏度和令人满意的稳定性，在连续眼压监测方面具有潜力。
