通过直流磁控溅射ZrB-MoSi靶材制备的Zr-Mo-Si-B-(N)硬质涂层的结构与性能

Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB-MoSi Target.

作者信息

Kiryukhantsev-Korneev Philipp, Sytchenko Alina, Pogozhev Yuriy, Vorotilo Stepan, Orekhov Anton, Loginov Pavel, Levashov Evgeny

机构信息

Scientific-Educational Center of SHS, National University of Science and Technology "MISiS", 119049 Moscow, Russia.

Laboratory of Electron Diffraction, Federal Scientific Research Centre "Crystallography and Photonics", Russian Academy of Sciences, Leninsky Prospect 59, 119333 Moscow, Russia.

出版信息

Materials (Basel). 2021 Apr 13;14(8):1932. doi: 10.3390/ma14081932.

DOI:10.3390/ma14081932

PMID:33924418

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8070280/

Abstract

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB-MoSi targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000-1500 °C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 °C. High oxidation resistance is realized due to the formation of the protective (SiO + ZrO)/SiO oxide layer, which inhibits the diffusion of oxygen into the coating.

摘要

通过在氩气和氮气中对ZrB-MoSi靶材进行磁控溅射，在Zr-Mo-Si-B-N体系中沉积涂层。使用扫描电子显微镜、X射线衍射、能量色散光谱和辉光放电光发射光谱对涂层结构进行了研究。使用纳米压痕和销盘测试测量了力学和摩擦学性能。通过在1000-1500°C的空气中退火和精确重量测量来评估抗氧化性和氧化动力学。我们发现，在氩气中沉积的涂层表现出优异的综合性能，包括36 GPa的硬度、84%的弹性回复率、0.6的摩擦系数以及在高达1200°C的温度下的抗氧化性。由于形成了保护性的(SiO + ZrO)/SiO氧化层，抑制了氧气向涂层中的扩散，从而实现了高抗氧化性。