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分辨率低于10纳米的嵌段共聚物的热成像

Thermal Imaging of Block Copolymers with Sub-10 nm Resolution.

作者信息

Gottlieb Steven, Pigard Louis, Ryu Yu Kyoung, Lorenzoni Matteo, Evangelio Laura, Fernández-Regúlez Marta, Rawlings Colin D, Spieser Martin, Perez-Murano Francesc, Müller Marcus, Knoll Armin W

机构信息

Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain.

Institute for Theoretical Physics, Georg-August-University, 37077 Göttingen, Germany.

出版信息

ACS Nano. 2021 May 25;15(5):9005-9016. doi: 10.1021/acsnano.1c01820. Epub 2021 May 3.

DOI:10.1021/acsnano.1c01820
PMID:33938722
Abstract

Thermal silicon probes have demonstrated their potential to investigate the thermal properties of various materials at high resolution. However, a thorough assessment of the achievable resolution is missing. Here, we present a probe-based thermal-imaging technique capable of providing sub-10 nm lateral resolution at a sub-10 ms pixel rate. We demonstrate the resolution by resolving microphase-separated PS--PMMA block copolymers that self-assemble in 11 to 19 nm half-period lamellar structures. We resolve an asymmetry in the heat flux signal at submolecular dimensions and assess the ratio of heat flux into both polymers in various geometries. These observations are quantitatively compared with coarse-grained molecular simulations of energy transport that reveal an enhancement of transport along the macromolecular backbone and a Kapitza resistance at the internal interfaces of the self-assembled structure. This comparison discloses a tip-sample contact radius of ≈ 4 nm and identifies combinations of enhanced intramolecular transport and Kapitza resistance.

摘要

热硅探针已展现出在高分辨率下研究各种材料热性能的潜力。然而,目前尚缺乏对可实现分辨率的全面评估。在此,我们提出一种基于探针的热成像技术,该技术能够以低于10毫秒/像素的速率提供低于10纳米的横向分辨率。我们通过解析在11至19纳米半周期层状结构中自组装的微相分离聚苯乙烯-聚甲基丙烯酸甲酯嵌段共聚物来展示这种分辨率。我们解析了亚分子尺寸下热流信号的不对称性,并评估了在各种几何形状中进入两种聚合物的热流比例。这些观测结果与能量传输的粗粒度分子模拟进行了定量比较,模拟结果揭示了沿大分子主链传输的增强以及自组装结构内部界面处的卡皮查电阻。这种比较揭示了约4纳米的针尖-样品接触半径,并确定了分子内传输增强和卡皮查电阻的组合。

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