Nakashima Rihachiro, Takahashi Hidetoshi
Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama, Kanagawa 223-8522, Japan.
Micromachines (Basel). 2021 Apr 30;12(5):507. doi: 10.3390/mi12050507.
Angular acceleration sensors are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotational-symmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10/(rad/s), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk.
角加速度传感器作为监测旋转振动的传感器正受到关注。已经开发出了许多角加速度传感器；然而，多轴测量仍处于具有挑战性的阶段。在本研究中，我们提出了一种双轴角加速度传感器，它由两个正交排列的单轴传感器单元组成。传感器单元由两个旋转对称的螺旋通道和微机电系统（MEMS）压阻悬臂组成。悬臂放置在每个通道中平行排列的螺旋的交汇处，以中断流体流动。当在双应变片法中使用两个悬臂作为桥路的电阻时，旋转对称的螺旋通道提高了目标轴的灵敏度，同时消除了非目标轴的灵敏度。所制造的器件在1至15Hz范围内以近似恒定的灵敏度响应，其值为3.86×10 /(rad/s)，与理论值相等。非目标轴灵敏度约为目标轴灵敏度的1/400。此外，我们证明当器件沿两个相应的旋转轴平面倾斜时，每个单元会根据倾斜角度做出响应。因此，可以得出结论，所开发的器件实现了具有低串扰的双轴角加速度测量。
