Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.
Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronic Engineering, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China.
ACS Sens. 2021 May 28;6(5):1785-1795. doi: 10.1021/acssensors.0c02547. Epub 2021 May 5.
Wearable electronics, electronic skins, and human-machine interfaces demand flexible sensors with not only high sensitivity but also a wide linear working range. The latter remains a great challenge and has become a big hurdle for some of the key advancements imperative to these fields. Here, we present a flexible capacitive pressure sensor with ultrabroad linear working range and high sensitivity. The dielectric layer of the sensor is composed of multiple layers of double-sided microstructured ionic gel films. The multilayered structure and the gaps between adjacent films with random topography and size enhance the compressibility of the sensor and distribute the stress evenly to each layer, enabling a linear working range from 0.013 to 2063 kPa. Also, the densely distributed protrusive microstructures in the electric double layer contribute to a sensitivity of 9.17 kPa for the entire linear working range. For the first time, a highly sensitive pressure sensor that can measure loading conditions across 6 orders of magnitude is demonstrated. With the consistent and stable performance from a low- to high-measurement range, the proposed pressure sensor can be used in many applications without the need for recalibration to suit different loading scenarios.
可穿戴电子设备、电子皮肤和人机界面需要具有高灵敏度和宽线性工作范围的柔性传感器。后者仍然是一个巨大的挑战，也是这些领域一些关键进展的重大障碍。在这里，我们提出了一种具有超宽线性工作范围和高灵敏度的柔性电容式压力传感器。传感器的介电层由多层双面微结构化离子凝胶膜组成。多层结构和相邻薄膜之间的间隙具有随机的形貌和尺寸，增强了传感器的可压缩性，并将应力均匀分布到每个层，从而实现了从 0.013 到 2063 kPa 的线性工作范围。此外，双电层中密集分布的突出微结构有助于在整个线性工作范围内实现 9.17 kPa 的灵敏度。首次展示了一种能够测量 6 个数量级加载条件的高灵敏度压力传感器。由于从低测量范围到高测量范围的一致性和稳定性能，所提出的压力传感器可以在许多应用中使用，而无需重新校准以适应不同的加载情况。
