Xu Dandan, Duan Ling, Yan Suyun, Wang Yong, Cao Ke, Wang Weidong, Xu Hongcheng, Wang Yuejiao, Hu Liangwei, Gao Libo
School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China.
CityU-Xidian Joint Laboratory of Micro/Nano-Manufacturing, Xi'an 710071, China.
Micromachines (Basel). 2022 Apr 22;13(5):660. doi: 10.3390/mi13050660.
Flexible pressure sensors play an important role in flexible robotics, human-machine interaction (HMI), and human physiological information. However, most of the reported flexible pressure sensors suffer from a highly nonlinear response and a significant decrease in sensitivity at high pressures. Herein, we propose a flexible novel iontronic pressure sensor based on monolayer molybdenum disulfide (MoS). Based on the unique structure and the excellent mechanical properties as well as the large intercalation capacitance of MoS, the prepared sensor holds an ultra-high sensitivity ( = 89.75 kPa) and a wide sensing range (722.2 kPa). Further, the response time and relaxation time of the flexible sensor are only 3 ms, respectively, indicating that the device can respond to external pressure rapidly. In addition, it shows long-term cycling stability (over 5000 cycles with almost no degradation) at a high pressure of 138.9 kPa. Finally, it is demonstrated that the sensor can be used in physiological information monitoring and flexible robotics. It is anticipated that our prepared sensor provide a reliable approach to advance the theory and practicality of the flexible sensor electronics.
柔性压力传感器在柔性机器人技术、人机交互（HMI）以及人体生理信息监测方面发挥着重要作用。然而，大多数已报道的柔性压力传感器存在高度非线性响应以及在高压下灵敏度显著下降的问题。在此，我们提出一种基于单层二硫化钼（MoS）的新型柔性离子型压力传感器。基于MoS独特的结构、优异的机械性能以及较大的嵌入电容，所制备的传感器具有超高灵敏度（= 89.75 kPa）和较宽的传感范围（722.2 kPa）。此外，该柔性传感器的响应时间和弛豫时间分别仅为3 ms，表明该器件能够快速响应外部压力。另外，在138.9 kPa的高压下，它表现出长期循环稳定性（超过5000次循环且几乎无降解）。最后，证明了该传感器可用于生理信息监测和柔性机器人技术。预计我们制备的传感器为推进柔性传感器电子学的理论和实用性提供了一种可靠的方法。
