Wang Xinya, Yu Xiaoming, Berg Matthew J, Chen Pingping, Lacroix Brice, Fathpour Sasan, Lei Shuting
Opt Express. 2021 May 10;29(10):14201-14207. doi: 10.1364/OE.419074.
We demonstrate, for the first time, the direct writing of curved optical waveguides in monocrystalline silicon with curve radii from 2 mm to 6 cm. The bending loss of the curved waveguides is measured and a good agreement with theoretical values is found. Raman spectroscopy measurements suggest the formation of inhomogeneous amorphous and polycrystalline phases in the laser-modified region. This direct laser-writing method may advance fabrication capabilities for integrated 3D silicon photonic devices.
我们首次展示了在单晶硅中直接写入弯曲半径从2毫米到6厘米的弯曲光波导。测量了弯曲光波导的弯曲损耗，并发现其与理论值吻合良好。拉曼光谱测量表明在激光改性区域形成了不均匀的非晶相和多晶相。这种直接激光写入方法可能会推动集成3D硅光子器件的制造能力。
