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不锈钢、铝、铜的超短单脉冲激光烧蚀及其对脉冲持续时间的依赖性。

Ultrashort single-pulse laser ablation of stainless steel, aluminium, copper and its dependence on the pulse duration.

作者信息

Winter Jan, Spellauge Maximilian, Hermann Jens, Eulenkamp Constanze, Huber Heinz P, Schmidt Michael

出版信息

Opt Express. 2021 May 10;29(10):14561-14581. doi: 10.1364/OE.421097.

Abstract

In this work, we investigate single-pulse laser ablation of bulk stainless steel (AISI304), aluminium (Al) and copper (Cu) and its dependence on the pulse duration. We measured the reflectivity, ablation thresholds and volumes under the variation of pulse duration and fluence. The known drop of efficiency with increasing pulse duration is confirmed for single-pulse ablation in all three metals. We attribute the efficiency drop to a weakened photomechanically driven ablation process and a stronger contribution of photothermal phase explosion. The highest energetic efficiency and precision is achieved for pulse durations below the mechanical expansion time of 3-5 ps, where the stress confinement condition is fulfilled.

摘要

在本工作中,我们研究了块状不锈钢(AISI304)、铝(Al)和铜(Cu)的单脉冲激光烧蚀及其对脉冲持续时间的依赖性。我们测量了在脉冲持续时间和能量密度变化情况下的反射率、烧蚀阈值和烧蚀体积。在所有三种金属的单脉冲烧蚀中,均证实了随着脉冲持续时间增加效率下降这一已知现象。我们将效率下降归因于光机械驱动烧蚀过程的减弱以及光热相爆炸的更大贡献。对于低于3 - 5皮秒机械膨胀时间的脉冲持续时间,实现了最高的能量效率和精度,此时满足应力限制条件。

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