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在标准300毫米硅片上单片生长的损耗耦合分布式反馈纳米脊激光器。

Loss-coupled DFB nano-ridge laser monolithically grown on a standard 300-mm Si wafer.

作者信息

Shi Yuting, Pantouvaki Marianna, Van Campenhout Joris, Colucci Davide, Baryshnikova Marina, Kunert Bernardette, Van Thourhout Dries

出版信息

Opt Express. 2021 May 10;29(10):14649-14657. doi: 10.1364/OE.422245.

DOI:10.1364/OE.422245
PMID:33985182
Abstract

We present a loss-coupled distributed feedback microlaser, monolithically grown on a standard 300-mm Si wafer using nano-ridge engineering. The cavity is formed by integrating a metallic grating on top of the nano-ridge. This allows forming a laser cavity without etching the III-V material, avoiding damaged interfaces and the associated carrier loss. Simulations, supported by experimental characterisation of the modal gain of the nano-ridge devices, predict an optimal duty cycle for the grating of ~0.4, providing a good trade-off between coupling strength and cavity loss for the lasing mode. The model was experimentally verified by characterising the lasing threshold and external efficiency of devices exhibiting gratings with varying duty cycle. The high modal gain and low threshold obtained prove the excellent quality of the epitaxial material. Furthermore, the low loss metal grating might provide a future route to electrical injection and efficient heat dissipation of these nanoscale devices.

摘要

我们展示了一种采用纳米脊工程技术在标准300毫米硅晶圆上单片生长的损耗耦合分布反馈微激光器。通过在纳米脊顶部集成金属光栅来形成腔。这使得无需蚀刻III-V族材料就能形成激光腔,避免了界面受损以及相关的载流子损耗。由纳米脊器件模态增益的实验表征支持的模拟预测,光栅的最佳占空比约为0.4,这在耦合强度和激光模式的腔损耗之间提供了良好的权衡。通过表征具有不同占空比光栅的器件的激光阈值和外部效率,对该模型进行了实验验证。所获得的高模态增益和低阈值证明了外延材料的优异质量。此外,低损耗金属光栅可能为这些纳米级器件的电注入和高效散热提供一条未来途径。

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