Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland.
Sensors (Basel). 2021 May 20;21(10):3564. doi: 10.3390/s21103564.
The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor.
MEMS 传感器的不断发展和微型化，为其在与健康相关和医疗应用中的使用提供了新的可能性。MEMS 器件在足动描记系统中的应用可以实现更快的诊断，并显著简化医务人员的工作。MEMS 加速度计是此类系统的重要组成部分，特别是那些用于监测平衡障碍患者的系统。正确设计此类传感器对于收集有关患者运动的数据以及确保整个系统的整体性能至关重要。本文介绍了一款三轴加速度计的设计和测量，该加速度计专门用于跟踪患者运动的设备中。其主要重点是传感器的特性描述，比较不同的设计，并评估封装和读出电路集成对传感器操作的影响。广泛的测试和测量证实，所设计的加速度计工作正常，并能够根据灵敏度/稳定性来确定最佳设计。此外，只有当读出电路与 MEMS 传感器集成在同一个封装中时，所提出的传感器的响应作为施加加速度的函数才表现出非常好的线性度。
