Wei Qiqin, Xiao Jing, Yang Daoguo, Cai Kaida
Appl Opt. 2021 Jun 10;60(17):5252-5257. doi: 10.1364/AO.425679.
We propose an ultra-compact electro-optic microring modulator based on a hybrid plasmonic waveguide. In comparison to previously proposed structures, the present structure utilizes aluminum-doped zinc oxide (AZO), rather than noble metals, for plasmon excitation. AZO can be used to simultaneously tune both the real and imaginary parts of the dielectric constant by changing the carrier concentration. The modulation depth and insertion loss of the microring modulator are 18.70 and 2.76 dB. The proposed modulator has a high modulation speed because its capacitance is 0.22 fF. This device could be used in high-density integrated optical circuits.
我们提出了一种基于混合等离子体波导的超紧凑型电光微环调制器。与先前提出的结构相比,当前结构利用掺铝氧化锌(AZO)而非贵金属来激发等离子体。通过改变载流子浓度,AZO可用于同时调节介电常数的实部和虚部。该微环调制器的调制深度和插入损耗分别为18.70和2.76 dB。所提出的调制器具有较高的调制速度,因为其电容为0.22 fF。该器件可用于高密度集成光电路。