Roshchupkin Dmitry, Redkin Arkady, Emelin Eugenii, Sakharov Sergey
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, Russia.
FOMOS Materials Co., Buzheninova St. 16, 105023 Moscow, Russia.
Sensors (Basel). 2021 Jun 17;21(12):4170. doi: 10.3390/s21124170.
The possibility of creating resonant ultraviolet (UV) sensors based on the structure of ZnO nanorods/LaGaSiO microbalance (LCM) has been investigated. The principle of sensor operation is based on the desorption of oxygen from the surface of ZnO nanorods upon irradiation with UV light and an increase in the concentration of charge carriers that leads to an increase in the capacitance of the structure of ZnO nanorods/LCM. It has been shown that UV radiation intensity affects the resonance oscillation frequency of the LCM sensor. After the end of irradiation, the reverse process of oxygen adsorption on the surface of ZnO nanorods occurs, and the resonance frequency of the sensor oscillations returns to the initial value.
基于ZnO纳米棒/镧镓硅微天平(LCM)结构制造共振紫外(UV)传感器的可能性已得到研究。传感器的工作原理基于紫外光照射时ZnO纳米棒表面的氧脱附以及电荷载流子浓度的增加,这会导致ZnO纳米棒/LCM结构的电容增加。结果表明,紫外辐射强度会影响LCM传感器的共振振荡频率。照射结束后,ZnO纳米棒表面会发生氧吸附的逆过程,传感器振荡的共振频率会恢复到初始值。