Terada D, Iuchi T
Innovation Center, CHINO Corporation, 32-8 Kumano, Itabashi, Tokyo 173-8632, Japan.
Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan.
Rev Sci Instrum. 2021 May 1;92(5):054903. doi: 10.1063/5.0049666.
In this work, a method to simultaneously measure the temperature and emissivity of any specimen, including metals and semiconductor materials, was developed using a concave mirror and a polarized radiometer. The ratio of the enhanced radiance after reflection off the mirror to the original radiance of a specimen allowed for emissivity determination in the range 0.1-0.9, with a variation of 8%. The combined standard uncertainty, u, of the temperature measurement by the current method is estimated to be 6.0 K at a temperature of 800 K. This was realized via classification of the parameter α into only three categories that were closely related to the surface roughness. Furthermore, it should be emphasized that the polarized spectral radiance measurements were carried out at a zenith angle of 75°, which contributed significantly to the success of this method.
在这项工作中,开发了一种使用凹面镜和偏振辐射计同时测量任何样品(包括金属和半导体材料)温度和发射率的方法。样品经镜面反射后的增强辐射与原始辐射之比可用于在0.1 - 0.9范围内确定发射率,变化幅度为8%。在800 K的温度下,通过当前方法进行温度测量的合成标准不确定度u估计为6.0 K。这是通过将参数α仅分类为与表面粗糙度密切相关的三个类别来实现的。此外,应该强调的是,偏振光谱辐射测量是在75°的天顶角下进行的,这对该方法的成功起到了重要作用。