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一种基于MEMS电场传感器的非侵入式电压测量方案:交流电源线的理论分析与实验验证

A non-intrusive voltage measurement scheme based on MEMS electric field sensors: Theoretical analysis and experimental verification of AC power lines.

作者信息

Yang Pengfei, Wen Xiaolong, Lv Yao, Chu Zhaozhi, Peng Chunrong

机构信息

School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China.

School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, China.

出版信息

Rev Sci Instrum. 2021 Jun 1;92(6):065002. doi: 10.1063/5.0052678.

DOI:10.1063/5.0052678
PMID:34243589
Abstract

A non-interference AC voltage measurement system based on a resonant electric field microsensor is proposed. The equivalent circuit of the proposed system is established, which shows that the frequency response function is only related to the capacitances of the system structure in the kHz low-frequency range. Furthermore, the sensitivity analysis and experiments demonstrate that the amplitude sensitivity is independent of the frequency of an unknown AC voltage. Therefore, this technique is very suitable for measuring arbitrary waveform voltage. A functional prototype was developed and tested to acquire AC power-line voltages. The prototype responded well to the transient waveform of the AC input signal, yet with a phase delay of 177.24°. The output of the system was linear in the range of 0-1000 V at 50-Hz and the linearity was 0.54%, whereas the maximum relative deviation of the rms voltage measurements above 10 V was -0.83%. Finally, the shielding ability of the system against interference and noise was verified through the AC interference voltage measurement.

摘要

提出了一种基于谐振电场微传感器的非干扰交流电压测量系统。建立了该系统的等效电路,结果表明在kHz低频范围内频率响应函数仅与系统结构的电容有关。此外,灵敏度分析和实验表明,幅度灵敏度与未知交流电压的频率无关。因此,该技术非常适合测量任意波形电压。开发并测试了一个功能原型以获取交流电源线电压。该原型对交流输入信号的瞬态波形响应良好,但存在177.24°的相位延迟。该系统在50Hz时0 - 1000V范围内输出呈线性,线性度为0.54%,而高于10V的均方根电压测量的最大相对偏差为 - 0.83%。最后,通过交流干扰电压测量验证了该系统对干扰和噪声的屏蔽能力。

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