Laser digital manufacturing of high-performance photodetectors based on a semiconductor microwire.

Digital manufacturing technology meets the needs of today's technological development. However, the post-processing is essential for some digital fabrication methods, such as annealing and ultraviolet (UV) exposure. Femtosecond laser direct writing (FsLDW) has gained considerable attention, because it is a non-photolithographic, non-vacuum, and no heat fabrication method. The photodetectors based on a semiconductor microwire were fabricated via FsLDW. Finally, the responsivity of the fabricated photodetectors based on zinc oxide (ZnO), titanium dioxide (), and tin oxide () can reach 14.27, 1.3, and 81 A/W, respectively. The enhanced performance is attributed to the rough and porous surface of ZnO, , and microwires. The whole preparation process is realized by the programmed control femtosecond laser scanning path. This Letter demonstrates that the fabrication method has potential in the digital manufacturing of high-performance UV photodetectors.