Zhang Chunhuan, Dong Haiyun, Zhang Chuang, Fan Yuqing, Yao Jiannian, Zhao Yong Sheng
Key Laboratory of Photochemistry, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China.
Sci Adv. 2021 Jul 30;7(31). doi: 10.1126/sciadv.abh3530. Print 2021 Jul.
Flexible photonics is rapidly emerging as a promising platform for artificial smart skins to imitate or extend the capabilities of human skins. Organic material systems provide a promising avenue to directly fabricate large-scale flexible device units; however, the versatile fabrication of all-organic integrated devices with desired photonic functionalities remains a great challenge. Here, we develop an effective technique for the mass processing of organic microlaser arrays, which act as sensing units, on the chip of photonic skins. With a bilayer electron-beam direct writing method, we fabricated flexible mechanical sensor networks composed of coupled-cavity single-mode laser sources on pliable polymer substrates. These microlaser-based mechanical sensor chips were subsequently used to recognize hand gestures, showing great potential for artificial skin applications. This work represents a substantial advance toward scalable construction of high-performance and low-cost flexible photonic chips, thus paving the way for the implementation of smart photonic skins into practical applications.
柔性光子学正迅速崛起,成为用于人造智能皮肤以模仿或扩展人类皮肤功能的一个有前景的平台。有机材料系统为直接制造大规模柔性器件单元提供了一条有前景的途径;然而,具有所需光子功能的全有机集成器件的通用制造仍然是一个巨大挑战。在此,我们开发了一种用于在光子皮肤芯片上大规模加工用作传感单元的有机微激光阵列的有效技术。通过双层电子束直写方法,我们在柔韧的聚合物基板上制造了由耦合腔单模激光源组成的柔性机械传感器网络。这些基于微激光的机械传感器芯片随后被用于识别手势,在人造皮肤应用中显示出巨大潜力。这项工作代表了在高性能和低成本柔性光子芯片的可扩展构建方面取得的重大进展,从而为将智能光子皮肤应用于实际铺平了道路。