Belhaj M, Dadouch S
ONERA/DPHY, Université de Toulouse, Toulouse, France.
Rev Sci Instrum. 2021 Aug 1;92(8):083301. doi: 10.1063/5.0057488.
A simple method is proposed to calibrate the energy of an electron beam. An electrical floating metal foil is irradiated by the incident electrons. The electron energy is deduced from the magnitude of the surface potential developed on the irradiated conductor surface. The measurement of the surface potential is made outside the vacuum chamber on a metallic slab connected through a coaxial feedthrough to the electron irradiated sample. The energy calibration obtained by this method is compared to the conventional method based on measuring the energy position of the backscattered electron elastic peak.
提出了一种校准电子束能量的简单方法。用入射电子辐照一个电悬浮金属箔。电子能量由辐照导体表面产生的表面电势大小推导得出。表面电势的测量在真空腔外部进行，测量对象是通过同轴馈通与电子辐照样品相连的金属平板。将通过该方法获得的能量校准结果与基于测量背散射电子弹性峰能量位置的传统方法进行比较。
