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基于多种样条滤波方法比较的表面形貌测量中高频误差抑制

Suppression of the High-Frequency Errors in Surface Topography Measurements Based on Comparison of Various Spline Filtering Methods.

作者信息

Podulka Przemysław

机构信息

Faculty of Mechanical Engineering and Aeronautics, Rzeszow University of Technology, Powstancow Warszawy 8 Street, 35-959 Rzeszów, Poland.

出版信息

Materials (Basel). 2021 Sep 6;14(17):5096. doi: 10.3390/ma14175096.

DOI:10.3390/ma14175096
PMID:34501186
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8434231/
Abstract

The metrology of so-called "engineering surfaces" is burdened with a substantial risk of both measurement and data analysis errors. One of the most encouraging issues is the definition of frequency-defined measurement errors. This paper proposes a new method for the suppression and reduction of high-frequency measurement errors from the surface topography data. This technique is based on comparisons of alternative types of noise detection procedures with the examination of profile (2D) or surface (3D) details for both measured and modelled surface topography data. In this paper, the results of applying various spline filters used for suppressions of measurement noise were compared with regard to several kinds of surface textures. For the purpose of the article, the influence of proposed approaches on the values of surface topography parameters (from ISO 25178 for areal and ISO 4287 for profile standards) was also performed. The effect of the distribution of some features of surface texture on the results of suppressions of high-frequency measurement noise was also closely studied. Therefore, the surface topography analysis with Power Spectral Density, Autocorrelation Function, and novel approaches based on the spline modifications or studies of the shape of an Autocorrelation Function was presented.

摘要

所谓“工程表面”的计量学面临着测量和数据分析误差的重大风险。其中最令人鼓舞的问题之一是频率定义的测量误差的定义。本文提出了一种抑制和减少表面形貌数据中高频测量误差的新方法。该技术基于对不同类型噪声检测程序的比较，并对测量和建模的表面形貌数据的轮廓（二维）或表面（三维）细节进行检查。本文针对几种表面纹理，比较了用于抑制测量噪声的各种样条滤波器的应用结果。为了本文的目的，还研究了所提出的方法对表面形貌参数值（根据面积的ISO 25178标准和轮廓的ISO 4287标准）的影响。还深入研究了表面纹理的某些特征分布对高频测量噪声抑制结果的影响。因此，本文介绍了基于功率谱密度、自相关函数的表面形貌分析，以及基于样条修改或自相关函数形状研究的新方法。

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