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基于激光共焦显微镜的原位表面特征的非接触测量系统。

A Non-Contact Measuring System for In-Situ Surface Characterization Based on Laser Confocal Microscopy.

机构信息

Advanced Remanufacturing and Technology Centre (Agency for Science, Technology and Research), Singapore 637143, Singapore.

School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 637798, Singapore.

出版信息

Sensors (Basel). 2018 Aug 13;18(8):2657. doi: 10.3390/s18082657.

DOI:10.3390/s18082657
PMID:30104513
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6111828/
Abstract

The characterization of surface topographic features on a component is typically quantified using two-dimensional roughness descriptors which are captured by off-line desktop instruments. Ideally any measurement system should be integrated into the manufacturing process to provide in-situ measurement and real-time feedback. A non-contact in-situ surface topography measuring system is proposed in this paper. The proposed system utilizes a laser confocal sensor in both lateral and vertical scanning modes to measure the height of the target features. The roughness parameters are calculated in the developed data processing software according to ISO 4287. To reduce the inherent disadvantage of confocal microscopy, e.g., scattering noise at steep angles and background noise from specular reflection from the optical elements, the developed system has been calibrated and a linear correction factor has been applied in this study. A particular challenge identified for this work is the in-situ measurement of features generated by a robotized surface finishing system. The proposed system was integrated onto a robotic arm with the measuring distance and angle adjusted during measurement based on a CAD model of the component in question. Experimental data confirms the capability of this system to measure the surface roughness within the range of 0.2⁻7 μm (bandwidth of 300), with a relative accuracy of 5%.

摘要

通常使用二维粗糙度描述符来量化组件表面形貌特征，这些描述符是通过离线台式仪器捕获的。理想情况下，任何测量系统都应集成到制造过程中，以提供原位测量和实时反馈。本文提出了一种非接触式原位表面形貌测量系统。该系统在横向和纵向扫描模式下使用激光共焦传感器来测量目标特征的高度。根据 ISO 4287，在开发的数据处理软件中计算粗糙度参数。为了减少共焦显微镜的固有缺点，例如在陡峭角度处的散射噪声和来自光学元件镜面反射的背景噪声，开发的系统已经过校准，并在本研究中应用了线性校正因子。这项工作面临的一个特殊挑战是对机器人表面加工系统生成的特征进行原位测量。该系统已集成到机械臂上，在测量过程中根据有关组件的 CAD 模型调整测量距离和角度。实验数据证实了该系统在 0.2⁻7 μm 范围内（带宽为 300）测量表面粗糙度的能力，相对精度为 5%。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/589a39263f3e/sensors-18-02657-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/d56ceb427f9a/sensors-18-02657-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/4387bffd06f3/sensors-18-02657-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/76bbd8a2ae9c/sensors-18-02657-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/4ac9678334bc/sensors-18-02657-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/25500e8d2bf1/sensors-18-02657-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/53507ac200de/sensors-18-02657-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/68805338a2cd/sensors-18-02657-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/432855972490/sensors-18-02657-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/8b4c7dec9996/sensors-18-02657-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/3bb3fddd7a99/sensors-18-02657-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/589a39263f3e/sensors-18-02657-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/d56ceb427f9a/sensors-18-02657-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/4387bffd06f3/sensors-18-02657-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/76bbd8a2ae9c/sensors-18-02657-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/4ac9678334bc/sensors-18-02657-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/25500e8d2bf1/sensors-18-02657-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/53507ac200de/sensors-18-02657-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/68805338a2cd/sensors-18-02657-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/432855972490/sensors-18-02657-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/8b4c7dec9996/sensors-18-02657-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/3bb3fddd7a99/sensors-18-02657-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a682/6111828/589a39263f3e/sensors-18-02657-g011.jpg

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