Krupka Jerzy
Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, 00662 Warsaw, Poland.
Materials (Basel). 2021 Sep 6;14(17):5097. doi: 10.3390/ma14175097.
A review of measurement methods of the basic electromagnetic parameters of materials at microwave frequencies is presented. Materials under study include dielectrics, semiconductors, conductors, superconductors, and ferrites. Measurement methods of the complex permittivity, the complex permeability tensor, and the complex conductivity and related parameters, such as resistivity, the sheet resistance, and the ferromagnetic linewidth are considered. For dielectrics and ferrites, the knowledge of their complex permittivity and the complex permeability at microwave frequencies is of practical interest. Microwave measurements allow contactless measurements of their resistivity, conductivity, and sheet resistance. These days contactless conductivity measurements have become more and more important, due to the progress in materials technology and the development of new materials intended for the electronic industry such as graphene, GaN, and SiC. Some of these materials, such as GaN and SiC are not measurable with the four-point probe technique, even if they are conducting. Measurement fixtures that are described in this paper include sections of transmission lines, resonance cavities, and dielectric resonators.
本文对微波频率下材料基本电磁参数的测量方法进行了综述。所研究的材料包括电介质、半导体、导体、超导体和铁氧体。文中考虑了复介电常数、复磁导率张量、复电导率以及相关参数（如电阻率、薄层电阻和铁磁共振线宽）的测量方法。对于电介质和铁氧体，了解它们在微波频率下的复介电常数和复磁导率具有实际意义。微波测量能够对它们的电阻率、电导率和薄层电阻进行非接触测量。如今，由于材料技术的进步以及诸如石墨烯、氮化镓和碳化硅等面向电子工业的新型材料的开发，非接触电导率测量变得越来越重要。其中一些材料，如氮化镓和碳化硅，即使它们具有导电性，也无法用四点探针技术进行测量。本文所描述的测量装置包括传输线部分、谐振腔和介质谐振器。
