Bacchi Christian, Da Costa Gérald, Cadel Emmanuel, Cuvilly Fabien, Houard Jonathan, Vaudolon Charly, Normand Antoine, Vurpillot François
Normandie Université, UNIROUEN, INSA Rouen, CNRS, Groupe de Physique des Matériaux, 76000Rouen, France.
Microsc Microanal. 2021 Sep 20:1-16. doi: 10.1017/S1431927621012708.
A position and energy-sensitive detector has been developed for atom probe tomography (APT) instruments in order to deal with some mass peak overlap issues encountered in APT experiments. Through this new type of detector, quantitative and qualitative improvements could be considered for critical materials with mass peak overlaps, such as nitrogen and silicon in TiSiN systems, or titanium and carbon in cemented carbide materials. This new detector is based on a thin carbon foil positioned on the front panel of a conventional MCP-DLD detector. According to several studies, it has been demonstrated that the impact of ions on thin carbon foils has the effect of generating a number of transmitted and reflected secondary electrons. The number generated mainly depends on both the kinetic energy and the mass of incident particles. Despite the fact that this phenomenon is well known and has been widely discussed for decades, no studies have been performed to date for using it as a means to discriminate particles energy. Therefore, this study introduces the first experiments on a potential new generation of APT detectors that would be able to resolve mass peak overlaps through the energy-sensitivity of thin carbon foils.
为了解决原子探针断层扫描（APT）实验中遇到的一些质量峰重叠问题，已经为APT仪器开发了一种位置和能量敏感探测器。通过这种新型探测器，可以考虑对存在质量峰重叠的关键材料进行定量和定性改进，例如TiSiN系统中的氮和硅，或硬质合金材料中的钛和碳。这种新探测器基于位于传统MCP-DLD探测器前面板上的薄碳箔。根据多项研究，已经证明离子对薄碳箔的撞击会产生大量透射和反射的二次电子。产生的数量主要取决于入射粒子的动能和质量。尽管这一现象已为人所知并被广泛讨论了数十年，但迄今为止尚未进行任何研究将其用作区分粒子能量的手段。因此，本研究介绍了关于新一代潜在APT探测器的首次实验，该探测器将能够通过薄碳箔的能量敏感性解决质量峰重叠问题。
