Feng Rui, Wang Jiong, Qiao Wei, Wang Fu, Zhou Ming, Shang Xinglian, Yu Lei, Zhou Liuhui, Guo Shuwen
East China Institute of Photo-Electron IC, Suzhou 215163, China.
School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China.
Micromachines (Basel). 2021 Sep 16;12(9):1115. doi: 10.3390/mi12091115.
In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope's quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by -1.02%, -5.76%, and -3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed -99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.
在高可靠性应用中，需要实时了解MEMS陀螺仪的健康状况，以确保系统不会因错误的输出信号而失效。由于基于静电力原理的MEMS陀螺仪自测试不能在工作状态下进行。我们提出通过实时监测MEMS陀螺仪的正交误差信号，可以实现MEMS陀螺仪的在线自测试。从理论上分析了陀螺仪正交误差幅度信号与陀螺仪比例因子和偏置之间的相关性。基于十六边蛛网式MEMS陀螺仪，验证了基于正交误差信号的MEMS陀螺仪实时内置自测试（BIST）方法。通过人为地将陀螺仪的控制信号设置为零，我们模拟了几种陀螺仪故障的情况。此外，使用机械冲击台对陀螺仪进行冲击。在6000g的冲击后，与冲击前相比，陀螺仪的比例因子、偏置和正交误差幅度分别变化了-1.02%、-5.76%和-3.74%。在10000g的冲击后陀螺仪失效，与冲击前相比，正交误差幅度变化了-99.82%。实验结果表明，当正交误差信号的幅度严重偏离原始值时，可以确定陀螺仪的输出信号无效。
