Hantos Gergely, Flynn David, Desmulliez Marc P Y
Smart Systems Group, Earl Mountbatten Building, Research Institute of Sensors, Signals and Systems, School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK.
Micromachines (Basel). 2020 Dec 31;12(1):40. doi: 10.3390/mi12010040.
A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during system operation are being actively sought after. After an extensive review of the various testing methods, a classification table is provided that benchmarks such methods according to four performance metrics: ease of implementation, usefulness, test duration and power consumption. The performance table provides also the domain of application of the method that includes field test, power-on test or assembly phase test. Although BIST methods are application dependent, the use of the inherent multi-modal sensing capability of most sensors offers interesting prospects for effective BIST, as well as built-in self-repair (BISR).
本文提出了一种用于微机电系统（MEMS）测试的新型内置自测试（BIST）方法分类法。由于MEMS测试占最终产品总成本的50%，因此人们正在积极寻求具有成本效益、非侵入性且能够在系统运行期间非侵入性操作的BIST解决方案。在对各种测试方法进行广泛综述之后，提供了一个分类表，该表根据四个性能指标对这些方法进行基准测试：易于实现、有用性、测试持续时间和功耗。性能表还提供了该方法的应用领域，包括现场测试、加电测试或组装阶段测试。尽管BIST方法依赖于应用，但大多数传感器固有的多模态传感能力的使用为有效的BIST以及内置自修复（BISR）提供了有趣的前景。
