电磁集成扫描微镜的改进与优化

Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror.

作者信息

Chen Liang, Gu Wenwen

机构信息

College of Engineering and Technology, Southwest University, Chongqing 400715, China.

出版信息

Micromachines (Basel). 2021 Oct 4;12(10):1213. doi: 10.3390/mi12101213.

DOI:10.3390/mi12101213

PMID:34683264

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8539728/

Abstract

In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis, and experimental test are carried out, respectively. By changing the force form and external magnetic field of the device, the mechanical scanning angle, driving voltage, and resonant frequency of the electromagnetic ISM will be changed accordingly, and then the change of the working performance of the ISM is explored. Through the optimization analysis and comparative test, the optimal design scheme of driving system is obtained, and the effect of driving system on the working performance of the electromagnetic ISM is verified. The experimental results show that by optimizing the structure of the driving system, the mechanical scanning angle of the electromagnetic ISM is increased by about 20%, and the driving voltage is decreased about 10% observably, and the working performance of the electromagnetic ISM is significantly improved. The research results have important significance and practical application value for the extended application of the electromagnetic ISM in the field of optical detection.

摘要

本文研究了驱动系统对电磁集成扫描微镜（ISM）工作性能的影响。为进一步完善电磁ISM的优化设计，分别进行了详细的理论分析、仿真分析和实验测试。通过改变器件的受力形式和外部磁场，电磁ISM的机械扫描角度、驱动电压和共振频率将相应改变，进而探究ISM工作性能的变化。通过优化分析和对比测试，得到了驱动系统的最优设计方案，并验证了驱动系统对电磁ISM工作性能的影响。实验结果表明，通过优化驱动系统结构，电磁ISM的机械扫描角度提高了约20%，驱动电压显著降低了约10%，电磁ISM的工作性能得到显著提升。研究结果对电磁ISM在光学检测领域的拓展应用具有重要意义和实际应用价值。