Shao Jian, Li Qi, Feng Chuhuan, Li Wei, Yu Hongbin
Opt Lett. 2018 Mar 1;43(5):987-990. doi: 10.1364/OL.43.000987.
Aiming to pursue a micromirror possessing many desired characteristics, such as linear control, low power consumption, fast response, and easy fabrication, a new piezoelectric actuation strategy is presented. Different from conventional piezoelectric actuation cases, we first propose using AlN film as the active layer for actuating the micromirror. Owing to its good CMOS compatible deposition and patterning techniques, the AlN based piezoelectric micromirror has been successfully fabricated with a modified silicon-on-insulator-based microelectromechanical system (MEMS) process. At the same time, various mirror movement modes operating at high frequencies and excellent linear relationship between the movement and the control signal both have been experimentally demonstrated.
为了寻求一种具有线性控制、低功耗、快速响应和易于制造等诸多理想特性的微镜，提出了一种新的压电驱动策略。与传统的压电驱动情况不同，我们首次提出使用氮化铝（AlN）薄膜作为驱动微镜的有源层。由于其良好的与互补金属氧化物半导体（CMOS）兼容的沉积和图案化技术，基于AlN的压电微镜已通过一种改进的基于绝缘体上硅的微机电系统（MEMS）工艺成功制造出来。同时，各种在高频下运行的镜面运动模式以及运动与控制信号之间的出色线性关系均已通过实验得到证明。
