Yao Jinyuan, Zhang Qi, Zhang Haodong, Li Mengqiu, Lu Xichi, Xiao Yu, Yao Rujiao, Wang Xuhong
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Micromachines (Basel). 2021 Oct 18;12(10):1267. doi: 10.3390/mi12101267.
Triboelectric nanogenerators (TENG) can convert mechanical energy into electricity and exhibit unique advantages in the field of low-frequency and discrete energy harvesting. However, the interfacial state and stability between the triboelectric layer and electrode layer influence the output and applications of TENG. Herein, an in situ sputtering Ag process for fabricating induction electrodes is proposed to match with TENG. The sputtering Ag process is optimized by a variety of parameters, such as sputtering power, single-cycle time, number of cycles, cycle interval, and vacuum degree. In addition, the chemical state of Ag as a function of air placement is investigated, showing the sputtered Ag has excellent conductivity and stability. Moreover, four kinds of polymers are selected for fabricating TENGs based on the sputtered Ag induction electrodes, i.e., nylon 66, polyimide (PI), fluorinated ethylene propylene (FEP), and polydimethylsiloxane (PDMS), which shows great applicability. Considering the demand of flexible power suppliers, the sputtered Ag is integrated with a PDMS substrate, and shows good adhesion, flexibility, and ductility after severe deformation of the PDMS. Finally, the developed induction electrode processing technology is used in flexible TENG and shows great prospects in self-powered electronics for practical applications.
摩擦纳米发电机（TENG）能够将机械能转化为电能，在低频和离散能量收集领域展现出独特优势。然而，摩擦电层与电极层之间的界面状态和稳定性会影响TENG的输出及应用。在此，提出一种用于制备感应电极的原位溅射银工艺以匹配TENG。通过溅射功率、单周期时间、周期数、周期间隔和真空度等多种参数对溅射银工艺进行优化。此外，研究了银在不同空气放置条件下的化学状态，结果表明溅射银具有优异的导电性和稳定性。而且，基于溅射银感应电极选择了四种聚合物来制备TENG，即尼龙66、聚酰亚胺（PI）、氟化乙丙烯（FEP）和聚二甲基硅氧烷（PDMS），这显示出其具有很强的适用性。考虑到柔性电源的需求，将溅射银与PDMS基底集成，在PDMS发生严重变形后，溅射银仍表现出良好的附着力、柔韧性和延展性。最后，所开发的感应电极加工技术应用于柔性TENG，在实际应用的自供电电子设备中展现出广阔前景。
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