Lu Weifang, Nakayama Nanami, Ito Kazuma, Katsuro Sae, Sone Naoki, Miyamoto Yoshiya, Okuno Koji, Iwaya Motoaki, Takeuchi Tetsuya, Kamiyama Satoshi, Akasaki Isamu
Department of Materials Science and Engineering, Meijo University, 1-501 Shiogamaguchi, Tenpaku-ku, Nagoya 468-8502, Japan.
Koito Manufacturing Co., Ltd., Tokyo 108-8711, Japan.
ACS Appl Mater Interfaces. 2021 Nov 17;13(45):54486-54496. doi: 10.1021/acsami.1c13947. Epub 2021 Nov 3.
The morphology and crystalline quality of p-GaN shells on coaxial GaInN/GaN multiple quantum shell (MQS) nanowires (NWs) were investigated using metal-organic chemical vapor deposition. By varying the trimethylgallium (TMG) flow rate, Mg doping, and growth temperature, it was verified that the TMG supply and growth temperature were the dominant parameters in the control of the p-GaN shape on NWs. Specifically, a sufficiently high TMG supply enabled the formation of a pyramid-shaped NW structure with a uniform p-GaN shell. The ratio of the growth rate between the - and -planes on the NWs was calculated to be approximately 0.4545. High-angle annular dark-field scanning transmission electron microscopy characterization confirmed that no clear extended defects were present in the n-GaN core and MQS/p-GaN shells on the sidewall. Regarding the p-GaN shell above the -plane MQS region, only a few screw dislocations and Frank-type partial dislocations appeared at the interface between the serpentine -plane MQS and the p-GaN shell near the tips. This suggested that the crystalline quality of the MQS structure can trigger the formation of screw dislocations and Frank-type partial dislocations during the p-GaN growth. The growth mechanism of the p-GaN shell on NWs was also discussed. To inspect the electronic properties, a prototype of a micro light-emitting diode (LED) with a chip size of 50 × 50 μm was demonstrated in the NWs with optimal growth. By correlating the light output curve with the electroluminescence spectra, three different emission peaks (450, 470, and 510 nm) were assignable to the emission from the -, -, and -planes, respectively.
利用金属有机化学气相沉积法研究了同轴GaInN/GaN多量子壳(MQS)纳米线(NWs)上p-GaN壳层的形貌和晶体质量。通过改变三甲基镓(TMG)流量、Mg掺杂量和生长温度,证实了TMG供给量和生长温度是控制NWs上p-GaN形状的主要参数。具体而言,足够高的TMG供给量能够形成具有均匀p-GaN壳层的金字塔形NW结构。计算得出NWs上-面和-面之间的生长速率比约为0.4545。高角度环形暗场扫描透射电子显微镜表征证实,n-GaN核心和侧壁上的MQS/p-GaN壳层中不存在明显的扩展缺陷。关于-面MQS区域上方的p-GaN壳层,在蛇形-面MQS与尖端附近的p-GaN壳层之间的界面处仅出现了一些螺型位错和弗兰克型部分位错。这表明MQS结构的晶体质量会在p-GaN生长过程中引发螺型位错和弗兰克型部分位错的形成。还讨论了NWs上p-GaN壳层的生长机制。为了检测电子特性,在具有最佳生长条件的NWs中展示了芯片尺寸为50×50μm的微型发光二极管(LED)原型。通过将光输出曲线与电致发光光谱相关联,三个不同的发射峰(450、470和510nm)分别对应于-面、-面和-面的发射。