Barrera Gabriele, Celegato Federica, Cialone Matteo, Coïsson Marco, Rizzi Paola, Tiberto Paola
Advanced Materials Metrology and Life Sciences, Istituto Nazionale di Ricerca Metrologica (INRiM), Strada delle Cacce 91, I-10135 Torino, Italy.
CNR SPIN Genova, c.so F. M. Perrone 24, I-16152 Genova, Italy.
Sensors (Basel). 2021 Nov 8;21(21):7420. doi: 10.3390/s21217420.
Advances in nanofabrication techniques are undoubtedly needed to obtain nanostructured magnetic materials with physical and chemical properties matching the pressing and relentless technological demands of sensors. Solid-state dewetting is known to be a low-cost and "top-down" nanofabrication technique able to induce a controlled morphological transformation of a continuous thin film into an ordered nanoparticle array. Here, magnetic Fe70Pd30 thin film with 30 nm thickness is deposited by the co-sputtering technique on a monocrystalline (MgO) or amorphous (Si3N4) substrate and, subsequently, annealed to promote the dewetting process. The different substrate properties are able to tune the activation thermal energy of the dewetting process, which can be tuned by depositing on substrates with different microstructures. In this way, it is possible to tailor the final morphology of FePd nanoparticles as observed by advanced microscopy techniques (SEM and AFM). The average size and height of the nanoparticles are in the ranges 150-300 nm and 150-200 nm, respectively. Moreover, the induced spatial confinement of magnetic materials in almost-spherical nanoparticles strongly affects the magnetic properties as observed by in-plane and out-of-plane hysteresis loops. Magnetization reversal in dewetted FePd nanoparticles is mainly characterized by a rotational mechanism leading to a slower approach to saturation and smaller value of the magnetic susceptibility than the as-deposited thin film.
毫无疑问,需要纳米制造技术取得进展,以获得具有与传感器紧迫且不断发展的技术需求相匹配的物理和化学性质的纳米结构磁性材料。固态去湿是一种低成本的“自上而下”纳米制造技术,能够诱导连续薄膜发生可控的形态转变,形成有序的纳米颗粒阵列。在此,通过共溅射技术在单晶(MgO)或非晶(Si3N4)衬底上沉积厚度为30 nm的磁性Fe70Pd30薄膜,随后进行退火以促进去湿过程。不同的衬底性质能够调节去湿过程的活化热能,这可以通过沉积在具有不同微观结构的衬底上来调节。通过这种方式,可以如先进显微镜技术(SEM和AFM)所观察到的那样,定制FePd纳米颗粒的最终形态。纳米颗粒的平均尺寸和高度分别在150 - 300 nm和150 - 200 nm范围内。此外,如面内和面外磁滞回线所观察到的,在几乎为球形的纳米颗粒中诱导的磁性材料空间限制强烈影响磁性。去湿后的FePd纳米颗粒中的磁化反转主要以旋转机制为特征,导致达到饱和的过程较慢,并且磁化率值比沉积的薄膜小。