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用于图像传感器应用的基于纳米射流的介质双材料分色器的光学效率增强

Optical Efficiency Enhancement of Nanojet-Based Dielectric Double-Material Color Splitters for Image Sensor Applications.

作者信息

Shramkova Oksana, Drazic Valter, Varghese Bobin, Blondé Laurent, Allié Valerie

机构信息

InterDigital R&D France, Immersive Lab., 975 Avenue des Champs Blancs, 35576 Cesson Sevigne, France.

出版信息

Nanomaterials (Basel). 2021 Nov 12;11(11):3036. doi: 10.3390/nano11113036.

DOI:10.3390/nano11113036
PMID:34835802
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8623050/
Abstract

We propose a new type of color splitter, which guides a selected bandwidth of incident light towards the proper photosensitive area of the image sensor by exploiting the nanojet (NJ) beam phenomenon. Such splitting can be performed as an alternative to filtering out part of the received light on each color subpixel. We propose to split the incoming light thanks to a new type of NJ-based near-field focusing double-material element with an insert. To suppress crosstalk, we use a Deep-Trench Isolation (DTI) structure. We demonstrate that the use of a dielectric insert block allows for reduction in the size of the color splitting element. By changing the position of the DTI, the functionality of separating blue, green and red light can be improved.

摘要

我们提出了一种新型的分色器,它通过利用纳米射流(NJ)光束现象,将入射光的选定带宽引导至图像传感器的适当光敏区域。这种分光可以作为在每个颜色子像素上滤除部分接收光的替代方法来执行。我们建议借助一种新型的带有插入物的基于NJ的近场聚焦双材料元件来分光。为了抑制串扰,我们使用深沟槽隔离(DTI)结构。我们证明,使用介电插入块可以减小分色元件的尺寸。通过改变DTI的位置,可以提高分离蓝光、绿光和红光的功能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/67470f982b1f/nanomaterials-11-03036-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/5c263ef54c69/nanomaterials-11-03036-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/b5951e95b44f/nanomaterials-11-03036-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/8177813cec94/nanomaterials-11-03036-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/7187922b2832/nanomaterials-11-03036-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/bcc8eac0786e/nanomaterials-11-03036-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/d63265107d01/nanomaterials-11-03036-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/67470f982b1f/nanomaterials-11-03036-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/5c263ef54c69/nanomaterials-11-03036-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/b5951e95b44f/nanomaterials-11-03036-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/8177813cec94/nanomaterials-11-03036-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/7187922b2832/nanomaterials-11-03036-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/bcc8eac0786e/nanomaterials-11-03036-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/d63265107d01/nanomaterials-11-03036-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5a03/8623050/67470f982b1f/nanomaterials-11-03036-g007.jpg

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