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基于莫尔条纹采样扫描透射电子显微镜的晶格图像重建

Crystal lattice image reconstruction from Moiré sampling scanning transmission electron microscopy.

作者信息

Pofelski A, Bicket I, Botton G A

机构信息

Department of Materials Science and Engineering, McMaster University, Hamilton, ON L8S 4M1, Canada.

Department of Materials Science and Engineering, McMaster University, Hamilton, ON L8S 4M1, Canada.

出版信息

Ultramicroscopy. 2022 Mar;233:113426. doi: 10.1016/j.ultramic.2021.113426. Epub 2021 Nov 20.

Abstract

A wide range of reconstruction methods exist nowadays to retrieve data from their undersampled acquisition schemes. In the context of Scanning Transmission Electron Microscopy (STEM), compressed sensing methods successfully demonstrated the ability to retrieve crystalline lattice images from undersampled electron micrographs. In this manuscript, an alternative method is proposed based on the principles of Moiré sampling by intentionally generating aliasing artifacts and correcting them afterwards. The interference between the scanning grid of the electron beam raster and the crystalline lattice results in the formation of predictable sets of Moiré fringes (STEM Moiré hologram). Since the aliasing artifacts are simple spatial frequency shifts applied on each crystalline reflection, the crystal lattices can be recovered from the STEM Moiré hologram by reverting the aliasing frequency shifts from the Moiré reflections. Two methods are presented to determine the aliasing shifts for all the resolved crystalline reflections. The first approach is a prior knowledge-based method using information on the spatial frequency distribution of the crystal lattices (a common case in practice). The other option is a multiple sampling approach using different sampling parameters and does not require any prior knowledge. As an example, the Moiré sampling recovery method detailed in this manuscript is applied to retrieve the crystalline lattices from a STEM Moiré hologram recorded on a silicon sample. The great interest of STEM Moiré interferometry is to increase the field of view (FOV) of the electron micrograph (up to several microns). The Moiré sampling recovery method extends the application of the STEM imaging of crystalline materials towards low magnifications.

摘要

如今存在多种重建方法,用于从欠采样采集方案中检索数据。在扫描透射电子显微镜(STEM)的背景下,压缩感知方法成功证明了从欠采样电子显微照片中检索晶格图像的能力。在本论文中,提出了一种基于莫尔采样原理的替代方法,即有意生成混叠伪像并随后进行校正。电子束光栅的扫描网格与晶格之间的干涉导致形成可预测的莫尔条纹集(STEM莫尔全息图)。由于混叠伪像是应用于每个晶体反射的简单空间频率偏移,因此可以通过从莫尔反射中恢复混叠频率偏移,从STEM莫尔全息图中恢复晶格。提出了两种方法来确定所有解析晶体反射的混叠偏移。第一种方法是基于先验知识的方法,使用有关晶格空间频率分布的信息(实际中常见的情况)。另一种选择是使用不同采样参数的多重采样方法,并且不需要任何先验知识。例如,将本论文中详细介绍的莫尔采样恢复方法应用于从记录在硅样品上的STEM莫尔全息图中检索晶格。STEM莫尔干涉测量的一大优点是增加了电子显微照片的视野(FOV)(可达几微米)。莫尔采样恢复方法将晶体材料的STEM成像应用扩展到低放大倍数。

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