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使用非灰玻尔兹曼输运方程研究β-氧化镓薄膜中的热输运。

Thermal transport in beta-gallium oxide thin-films using non-gray Boltzmann transport equation.

作者信息

Kumar Nitish, Barry Matthew C, Kumar Satish

机构信息

G.W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, United States of America.

出版信息

J Phys Condens Matter. 2021 Dec 24;34(10). doi: 10.1088/1361-648X/ac413e.

DOI:10.1088/1361-648X/ac413e
PMID:34879360
Abstract

Phonon transport in-GaOthin films and metal-oxide field effect transistors (MESFETs) are investigated using non-gray Boltzmann transport equations (BTEs) to decipher the effect of ballistic-diffusive phonon transport. The effects of domain size, and energy dissipation to various phonon modes and subsequent phonon-phonon energy exchange on the thermal transport and temperature distribution is investigated using non-gray BTE. Our analysis deciphered that domain size plays a major role in thermal transport in-GaObut energy dissipation to various phonon modes and subsequent phonon-phonon energy exchange does not affect the temperature field significantly. Phonon transport in-GaOMESFETs on diamond substrate is investigated using coupled non-gray BTE and Fourier model. It is established that the ballistic effects need to be considered for devices with-GaOlayer thickness less than 1 m. A non-gray phonon BTE model should be used near hotspot in the thin-GaOlayer as the Fourier model may not give accurate temperature distribution. The results from this work will help in understanding the mechanism of phonon transport in the-GaOthin films and energy efficient design of its FETs.

摘要

使用非灰玻尔兹曼输运方程(BTEs)研究了氧化镓(In-GaO)薄膜和金属氧化物场效应晶体管(MESFETs)中的声子输运,以解读弹道-扩散声子输运的影响。使用非灰BTE研究了畴尺寸以及向各种声子模式的能量耗散和随后的声子-声子能量交换对热输运和温度分布的影响。我们的分析表明,畴尺寸在氧化镓(In-GaO)的热输运中起主要作用,但向各种声子模式的能量耗散和随后的声子-声子能量交换对温度场的影响并不显著。使用耦合的非灰BTE和傅里叶模型研究了金刚石衬底上的氧化镓(In-GaO)MESFETs中的声子输运。结果表明,对于氧化镓(In-GaO)层厚度小于1μm的器件,需要考虑弹道效应。在氧化镓(In-GaO)薄层的热点附近应使用非灰声子BTE模型,因为傅里叶模型可能无法给出准确的温度分布。这项工作的结果将有助于理解氧化镓(In-GaO)薄膜中的声子输运机制及其场效应晶体管的节能设计。

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