Yan Hao, Liao Xiaoping, Li Chenglin, Chen Chen
National ASIC Research Center, Southeast University, Nanjing 210096, China.
Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
Micromachines (Basel). 2021 Dec 5;12(12):1515. doi: 10.3390/mi12121515.
An amplitude demodulator with a large dynamic range, based on microelectromechanical systems (MEMS), is proposed in this paper. It is implemented as a cascade of a capacitive and a thermoelectric sensor. Two types of the transducer can improve the measurement range and enhance the overload capacity. This MEMS-based demodulation is realized by utilizing the square law relationship and the low-pass characteristic during the electromechanical and thermoelectric conversion. The fabrication of this device is compatible with the GaAs monolithic microwave integrated circuit (MMIC) process. Experiments show that this MEMS demodulator can realize the direct demodulation of an amplitude modulation (AM) signal with a carrier frequency of 0.35-10 GHz, and cover the power range from 0 to 23 dBm. This MEMS demodulator has the advantages of high power handling capability and zero DC power consumption.
本文提出了一种基于微机电系统（MEMS）的大动态范围幅度解调器。它由一个电容式传感器和一个热电传感器级联实现。两种类型的传感器可以提高测量范围并增强过载能力。这种基于MEMS的解调是通过在机电和热电转换过程中利用平方律关系和低通特性来实现的。该器件的制造与砷化镓单片微波集成电路（MMIC）工艺兼容。实验表明，这种MEMS解调器可以实现载波频率为0.35 - 10 GHz的调幅（AM）信号的直接解调，功率范围覆盖0至23 dBm。这种MEMS解调器具有高功率处理能力和零直流功耗的优点。
