微机电系统/纳机电系统谐振器的最新进展
The Recent Progress of MEMS/NEMS Resonators.
作者信息
Wei Lei, Kuai Xuebao, Bao Yidi, Wei Jiangtao, Yang Liangliang, Song Peishuai, Zhang Mingliang, Yang Fuhua, Wang Xiaodong
机构信息
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
The School of Microelectronics & Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
出版信息
Micromachines (Basel). 2021 Jun 19;12(6):724. doi: 10.3390/mi12060724.
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.
微机电系统/纳机电系统谐振器在生物检测、物理传感和量子耦合方面得到了广泛研究。本文综述了不同结构的微机电系统/纳机电系统谐振器的最新研究进展。详细介绍了单端或双端夹紧谐振器的谐振性能、新测试方法和制造工艺，以及它们在质量传感、微机械热分析、量子检测和振荡器中的应用。综述了半球形结构、微盘结构、鼓形谐振器等材料特性、谐振模式及其在陀螺仪等不同领域的应用。此外，还讨论了表面声波和体声波谐振器的工作原理和传感方法，以及它们在湿度传感和快速自旋控制等新应用。总结了音叉的结构和谐振性能。本文旨在根据不同结构对谐振器进行分类，并总结其工作原理、谐振性能和应用。
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