Yao Qingkai, Guo Xing, Xie Linfang, Sun Li, Yu Fapeng, Zhao Xian
Center for Optics Research and Engineering, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China.
Shandong Original Crystal Technology Co., Ltd., Jinan 250100, China.
Materials (Basel). 2021 Dec 10;14(24):7605. doi: 10.3390/ma14247605.
In this paper, a Fabry-Pérot interference fiber sensor was fabricated by using a Polyvinyl chloride membrane (20 μm in thickness) attached at the end of a ferrule with an inner diameter of 1.1 mm. In consideration of the vibration response of the membrane, the feature of the first-order natural frequency of membrane was analyzed by COMSOL Multiphysics. The acoustic sensing performance of the Fabry-Pérot fiber interference sensor was studied in air. The results reveal that the sensor possessed good acoustic pressure sensitivity, in the order of 33.26 mV/Pa. In addition, the noise-limited minimum detectable pressure level was determined to be 58.9 μPa/Hz and the pressure-induced deflection obtained was 105 nm/Pa at the frequency of 1 kHz. The response of the sensor was approximately consistent with the reference sensor from 1 to 7 kHz. All these results support that the fabricated Fabry-Pérot fiber interference sensor may be applied for ultra-sensitive pressure sensing applications.
在本文中，通过使用附着在内径为1.1毫米的插芯末端的聚氯乙烯膜（厚度为20微米）制造了一种法布里 - 珀罗干涉光纤传感器。考虑到膜的振动响应，利用COMSOL Multiphysics分析了膜的一阶固有频率特性。在空气中研究了法布里 - 珀罗光纤干涉传感器的声学传感性能。结果表明，该传感器具有良好的声压灵敏度，约为33.26 mV/Pa。此外，确定噪声限制的最小可检测压力水平为58.9 μPa/Hz，在1 kHz频率下压力引起的挠度为105 nm/Pa。该传感器在1至7 kHz范围内的响应与参考传感器大致一致。所有这些结果表明，所制造的法布里 - 珀罗光纤干涉传感器可应用于超灵敏压力传感应用。
