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带有超薄金膜的高灵敏度光纤尖端声学传感器。

High-sensitivity fiber-tip acoustic sensor with ultrathin gold diaphragm.

作者信息

Tong Yuanbiao, Pan Chenxinyu, Li Zhiyong, Chen Hongbo, Xue Dongsheng, Cheng Lin, Zhen Yuqi, Zhang Tong, Gao Yang, Zhang Lei, Guo Xin, Tong Limin, Wang Pan

出版信息

Opt Express. 2024 Apr 8;32(8):14674-14684. doi: 10.1364/OE.519624.

Abstract

Miniature acoustic sensors with high sensitivity are highly desired for applications in medical photoacoustic imaging, acoustic communications and industrial nondestructive testing. However, conventional acoustic sensors based on piezoelectric, piezoresistive and capacitive detectors usually require a large element size on a millimeter to centimeter scale to achieve a high sensitivity, greatly limiting their spatial resolution and the application in space-confined sensing scenarios. Herein, by using single-crystal two-dimensional gold flakes (2DGFs) as the sensing diaphragm of an extrinsic Fabry-Perot interferometer on a fiber tip, we demonstrate a miniature optical acoustic sensor with high sensitivity. Benefiting from the ultrathin thickness (∼8 nm) and high reflectivity of the 2DGF, the fiber-tip acoustic sensor gives an acoustic pressure sensitivity of ∼300 mV/Pa in the frequency range from 100 Hz to 20 kHz. The noise-equivalent pressure of the fiber-tip acoustic sensor at the frequency of 13 kHz is as low as 62.8 µPa/Hz, which is one or two orders of magnitude lower than that of reported optical acoustic sensors with the same size.

摘要

高灵敏度的微型声学传感器在医学光声成像、声学通信和工业无损检测等应用中具有很高的需求。然而,基于压电、压阻和电容探测器的传统声学传感器通常需要毫米到厘米尺度的大尺寸元件才能实现高灵敏度,这极大地限制了它们的空间分辨率以及在空间受限传感场景中的应用。在此,通过使用单晶二维金薄片(2DGFs)作为光纤尖端外部法布里-珀罗干涉仪的传感膜片,我们展示了一种具有高灵敏度的微型光声传感器。受益于2DGF的超薄厚度(约8纳米)和高反射率,光纤尖端声学传感器在100赫兹至20千赫的频率范围内给出了约300毫伏/帕的声压灵敏度。该光纤尖端声学传感器在13千赫频率下的等效噪声压力低至62.8微帕/赫兹,比报道的相同尺寸的光声传感器低一到两个数量级。

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