基于光子集成解调器的用于人体温度测量的硅基绝缘体上光波导布拉格光栅光子传感器

SOI Waveguide Bragg Grating Photonic Sensor for Human Body Temperature Measurement Based on Photonic Integrated Interrogator.

作者信息

Li Hongqiang, An Zhixuan, Mao Quanhua, Zuo Shasha, Zhu Wei, Zhang Shanshan, Zhang Cheng, Li Enbang, García Juan Daniel Prades

机构信息

Tianjin Key Laboratory of Optoelectronic Detection Technology and Systems, School of Electronics and Information Engineering, Tianjin 300387, China.

Textile Fiber Inspection Center, Tianjin Product Quality Inspection Technology Research Institute, Tianjin 300192, China.

出版信息

Nanomaterials (Basel). 2021 Dec 23;12(1):29. doi: 10.3390/nano12010029.

DOI:10.3390/nano12010029

PMID:35009979

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8746514/

Abstract

A waveguide Bragg grating (WBG) provides a flexible way for measurement, and it could even be used to measure body temperature like e-skin. We designed and compared three structures of WBG with the grating period, etching depth, and duty cycle. The two-sided WBG was fabricated. An experimental platform based on photonic integrated interrogator was set up and the experiment on the two-sided WBG was performed. Results show that the two-sided WBG can be used to measure temperature changes over the range of 35-42 °C, with a temperature measurement error of 0.1 °C. This approach has the potential to facilitate application of such a silicon-on-insulator (SOI) WBG photonic sensor to wearable technology and realize the measurement of human temperature.

摘要

波导布拉格光栅（WBG）为测量提供了一种灵活的方式，甚至可以像电子皮肤一样用于测量体温。我们设计并比较了三种具有不同光栅周期、蚀刻深度和占空比的WBG结构。制作了双面WBG。搭建了基于光子集成询问器的实验平台，并对双面WBG进行了实验。结果表明，双面WBG可用于测量35-42°C范围内的温度变化，温度测量误差为0.1°C。这种方法有潜力促进这种绝缘体上硅（SOI）WBG光子传感器在可穿戴技术中的应用，并实现人体温度的测量。