Li Zheng, Su Zhirong, Zhao Liang, Han Haitao, Guo Zhanyu, Zhao Yuyang, Sun Hexu
Department of Electrical Engineering, School of Electrical Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, China.
Micromachines (Basel). 2021 Feb 4;12(2):154. doi: 10.3390/mi12020154.
A novel piezoelectric actuator using a two-stage flexure hinge structure is proposed in this paper, which is used in a compact and high-precision electromechanical field. The two-stage flexure hinge structure is used to provide horizontal thrust and vertical clamping force to the driving feet, which solves the problems of unstable clamping force and insufficient load capacity in traditional stick-slip piezoelectric actuators. Firstly, the main structure of the driver and the working process under the triangular wave excitation voltage are briefly introduced. Secondly, after many simulation tests, the structure of the actuator is optimized and the stability of the structure in providing clamping force is verified. Finally, through the research of the operating performance, when the amplitude is 150 V and the frequency is 3.25 kHz as the excitation source, the maximum speed can reach 338 mm/s and can bear about 3 kg load. It can be seen from the analysis that the two-stage flexure hinge structure can improve the displacement trajectory.
本文提出了一种采用两级柔性铰链结构的新型压电致动器，其应用于紧凑且高精度的机电领域。两级柔性铰链结构用于为驱动脚提供水平推力和垂直夹紧力，解决了传统蠕动式压电致动器夹紧力不稳定和负载能力不足的问题。首先，简要介绍了驱动器的主要结构以及在三角波激励电压下的工作过程。其次，经过多次模拟测试，对致动器的结构进行了优化，并验证了该结构在提供夹紧力方面的稳定性。最后，通过对运行性能的研究，当以幅值为150 V、频率为3.25 kHz作为激励源时，最大速度可达338 mm/s，且能承受约3 kg的负载。从分析中可以看出，两级柔性铰链结构能够改善位移轨迹。
